Surface Technology Systems: Equipment Platforms
Posted by ~Ray @ 2008-01-01 23:51:22
STS offers a range of 5 different platform options each compatible with all STS affect technologies. They undergo been designed to furnish a logical upgrade path from R&D to pilot and volume production utilizing the same affect modules and thus avoiding the need for process re-qualification reducing the cost of introducing new device technologies
MPX system with additional atmospheric cassette-to-cassette robotic handler giving increased throughput for control production- Multi-chamber cluster tool hit vacuum cassette-cassette pilot and volume production– Multi-chamber cluster tool twin vacuum cassette-cassette volume production
In July 2004. STS announced a joint venture with Advanced Vacuum AB which resulted in the re-engineering of STS' established open-load 300-Series. The resulting and offer improved reliability and performance with an updated control system and user interface and are suitable for R&D applications. These manual-load affect tools are manufactured by Advanced Vacuum under licence from STS.[ADVERTHERE]Related article:
http://semiconductor.firstlightera.com/EN/Microsites/1/Surface+Technology+Systems/EquipmentPlatforms.htm
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